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Semiconductor Manufacturing and Research
The semiconductor industry is driven by an ever-increasing number of products powered by the microchip, with billions of circuits per chip. Computers and mobile devices such as smart phones, laptops, and tablet computers have become indispensable in our information age. The chips powering these devices are manufactured through repeated steps of vacuum processing.
A variety of vacuum systems, such as dry vacuum pumps, turbo molecular pumps, leak detectors, vacuum gauges and components are used to optimize performance across applications, ranging from light duty to the heaviest duty processes.
Applications include: Load lock, transfer chamber, metrology, lithography and EUV lithography, PVD process, PVD pre-clean, rapid thermal annealing, strip/ashing, dielectric etch, silicon conductor etch, metal conductor etch, PECVD and LPCVD, metal organic CVD, and atomic layer deposition.
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